photolithography$60409$ - ορισμός. Τι είναι το photolithography$60409$
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Τι (ποιος) είναι photolithography$60409$ - ορισμός


Chemistry of photolithography         
  • Schematic of a drop of liquid on a solid surface, allowing for further explanation of the Young's Relation equation.
  • Crystalline faces of silicon crystal
  • Silicon ingot formation using the Czochralski process
  • 3D image of HMDS
  • The chemical composition of hexamethylsilazane
  • A typical spin coating apparatus for applying HMDS and photoresist onto a silicon wafer
  • Treating a silicon wafer with HMDS, to make the silicon wafer hydrophobic.
OVERVIEW ARTICLE
Chemistry of Photolithography
Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro- and nano- scale, typically on the surface of silicon wafers, for the production of integrated circuits, microelectromechanical systems (MEMS), solar cells, and other devices.
Photolithography         
  • '''Gap width vs. half-pitch.''' The tighter the line pitch, the wider the gap between the ends of the lines (perpendicular to the pitch).
  • Illumination can significantly impact the apparent pitch of the image of the same object (a pair of bright lines in this case).
  • Straight edges of shortened features are distorted into bowed edges as pitch is reduced in both directions.
PROCESS USED IN MICROFABRICATION
Photolitography; Optical lithography; Optical Lithography; Photolithographic; Photo-lithography; Projection Optical Lithography; Photolithograph; Projection mask
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.
Photolithographic         
  • '''Gap width vs. half-pitch.''' The tighter the line pitch, the wider the gap between the ends of the lines (perpendicular to the pitch).
  • Illumination can significantly impact the apparent pitch of the image of the same object (a pair of bright lines in this case).
  • Straight edges of shortened features are distorted into bowed edges as pitch is reduced in both directions.
PROCESS USED IN MICROFABRICATION
Photolitography; Optical lithography; Optical Lithography; Photolithographic; Photo-lithography; Projection Optical Lithography; Photolithograph; Projection mask
·noun Of or pertaining to photolithography; produced by photolithography.