Photolithography
PROCESS USED IN MICROFABRICATION
Photolitography; Optical lithography; Optical Lithography; Photolithographic; Photo-lithography; Projection Optical Lithography; Photolithograph; Projection mask
In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.